Table 2 Comparison of the measured equivalent pressure sensitivity and calculated pressure sensitivity under a static state.

Frequency (Hz)	Receiving sensitivity S_x (dB)				20 log(kd) (dB)	Equivalent pressure sensitivity S_p (dB)
Frequency (Hz)	OVH	LVH	CuVH	WIVH	20 log(kd) (dB)	OVH	LVH	CuVH	WIVH
20	−214.4	−219.0	−220.6	−229.5	−41.5	−172.9	−177.5	−179.1	−188.0
31.5	−213.5	−213.5	−217.5	−224.0	−37.6	−175.9	−175.9	−179.9	−186.4
40	−211.7	−211.5	−216.0	−220.7	−35.5	−176.2	−176.0	−180.5	−185.2
50	−208.3	−209.7	−214.0	−219.2	−33.6	−174.7	−176.1	−180.4	−185.6
63	−207.0	−208.0	−212.5	−218.0	−31.6	−175.4	−176.4	−180.9	−186.4
80	−203.3	−205.7	−211.8	−216.3	−29.5	−173.8	−176.2	−182.3	−186.8
100	−202.1	−205.0	−209.2	−215.4	−27.6	−174.5	−177.4	−181.6	−187.8
125	−199.0	−203.6	−208.0	−214.1	−25.6	−173.4	−178.0	−182.4	−188.5
160	−194.7	−201.8	−206.0	−212.7	−23.5	−171.2	−178.3	−182.5	−189.2
200	−191.7	−199.2	−204.7	−211.4	−21.5	−170.2	−177.7	−183.2	−189.9
Average equivalent pressure sensitivity S_p (dB)						−173.8	−177.0	−181.3	−187.4
Difference in the average equivalent pressure sensitivity compared to that of the OVH (dB)						–	−3.2	−7.5	−13.6
Maximum stress on the beam via simulation (kPa)						131.7	114.8	58.1	35.2
Calculated pressure sensitivity under a static state S_{p_c} (dB)^a						−157.0	−158.2	−164.1	−168.5
Difference in the calculated pressure sensitivity under a static state compared to that of the OVH (dB)						–	−1.2	−7.1	−11.5

^a\(S_{p\_c} = 20{\mathrm{log}}\left( {\frac{{\pi _l\sigma _{{\mathrm{max}}V_{{\mathrm{in}}}\,A}}}{{M_{{\mathrm{ref}}}}}} \right)\), π_l is the piezoresistance coefficient, σ_max is the maximum stress on the beam, V_in is the input voltage, A is the amplification factor, and M_ref is the reference sensitivity of 0 dB (1 V/μPa).

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