Fig. 2: Fabrication results of the roll-to-roll colloidal 3D nanolithography system.
From: Continuous roll-to-roll patterning of three-dimensional periodic nanostructures
a One micron silica nanospheres assembled on a 100-mm Si substrate. b Diffraction from periodic 3D nanostructures with a 500-nm period patterned on a 50 × 200-mm2 PET film. c Top-view SEM image of photoresist nanostructures fabricated using 500 nm silica nanospheres and 325 nm exposure. Cross-section SEM images of the nanostructures fabricated using 500 nm silica nanospheres and exposure to a d 325-nm laser, e 405 nm laser diode, and f 450 nm laser diode. g Cross-sectional SEM images of the nanostructure fabricated using 1 μm silica nanospheres and a 325-nm laser. h Cross-sectional SEM image of the nanostructure fabricated using 500 nm silica nanospheres and a 405-nm laser diode
