Fig. 1: Schematic of fabrication of wafer-scaled gas sensors. | Microsystems & Nanoengineering

Fig. 1: Schematic of fabrication of wafer-scaled gas sensors.

From: “Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication

Fig. 1: Schematic of fabrication of wafer-scaled gas sensors.

a Schematic of a top-down and bottom-up combined strategy for fabricating wafer-scale miniaturized gas sensors; b schematic of template-guided controllable de-wetting and in-situ growth steps during wafer-scale fabrication process and relevant photograph results of some steps: (1) patterned dry film photoresist (DFP) dots were formed on the two-inch (2”) micro-hotplate wafer via photolithography; (2) the formed of water droplet array on the surface of DFP dots; (3) spin-coating of 18% TPE solution and waiting for evaporation of n-hexane; (4) the formed uniform porous TPE film with a gap to the DFP dots; (5) strip off of the DFP dots; (6) in-situ growth of Ni(OH)2 nanowalls; (7) peel off of the porous TPE film

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