Fig. 4: Temperature sweep and crystallorgraphic variations.
From: Low motional impedance distributed Lamé mode resonators for high frequency timing applications
a Measured turnover points at 95 and 170 °C for two beam DLR devices having a doping concentration variation of 5–7 × 1019 cm−3 and Q of 123 k is measured at 41 MHz for the beam DLR1 design (a, inset), where the TCF at the two turnover points is zero; b measurement setup of the DLR using a temperature chamber and network analyzer for frequency read-out; Simulated c thickness variation of ±1 µm shows a large frequency variation of ±8200 ppm for cross-sectional Lamé mode as compared to DLR which shows ±0.6 ppm; d variations of ±266 and ±63 ppm for IP and OOP variations respectively in the <100> crystallographic axis
