Fig. 3: Dynamic performance of the system. | Microsystems & Nanoengineering

Fig. 3: Dynamic performance of the system.

From: Programmable synchronization enhanced MEMS resonant accelerometer

Fig. 3

a The experimental setup of the dynamic test. The resonant accelerometer was placed on a shaker to sense the dynamic acceleration. The external reading oscillator was synchronized with the sensing oscillator and closely tracked its response with a sampling rate of 50 ms. During the vibration, a laser vibrometer was utilized to provide a standard calibration. b The experimental results of the dynamic test. Under the low-frequency vibration of 3 Hz, the amplitudes of the sensing oscillator and reading oscillator were both nearly equal to that of the laser vibrometer. These results meant that the reading oscillator could perfectly track and read out the dynamic environmental acceleration.

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