Table 3 Fitting parameters of the charge decay process at high humidity (99% RH)

From: Spray-coated electret materials with enhanced stability in a harsh environment for an MEMS energy harvesting device

 

#1 COC Spin

#3 COC Spray × 12

#4 COC Spray × 12 + 200 μL PS

#5 COC Spray × 12 + 400 μL PS

a1

0.6259

0.3974

0.3619

0.1149

b1

−6.3 × 10−3

−3.1 × 10−3

−6.7 × 10−3

−4.2 × 10−3

a2

0.3741

0.6025

0.6381

0.8851

b2

−3.62 × 10−5

−2.81 × 10−5

−2.92 × 10−5

−3.12 × 10−5

R2

0.9983

0.9994

0.9946

0.9868

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