Table 1 Selection of the parameters of the orthogonal experiment
From: A thin-film temperature sensor based on a flexible electrode and substrate
Parameters | Level one | Level two | Level three | |
|---|---|---|---|---|
A | Sputtering power (W) | 100 | 150 | 200 |
B | Argon flow rate (sccm) | 30 | 60 | 90 |
C | Vacuum degree (Torr) | 3e−5 | 8e−6 | 3e−6 |
