Fig. 2: 3D illustrations of four categories of MEMS inductor.
From: MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies
Category (i): 2D on-substrate inductors such as spiral inductors (a) and racetrack inductors (b). Category (ii): 3D on-substrate solenoidal inductors with a magnetic bar core (c). Category (iii): 2D in-substrate spiral inductor (d). Category (iv): 3D in-substrate toroidal inductor (e). The directions of current flows are depicted by the yellow arrows
