Fig. 6: A TSV-based process for fabricating a 3D in-substrate toroidal inductor57 (Copyright Springer Nature 2018).
From: MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies
a Fabricated inductors, including air-core toroidal inductors, a toroidal transformer, a solenoid inductor, a spiral inductor, and an inductor with an arbitrary “DTU” core shape. b Four main steps for fabricating the toroidal inductor181 (Copyright IEEE 2018)
