Fig. 2: Glass-like carbon (GC) thin film characterization.
From: SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
a Resistivity ρ of the GC thin films, measured by a four-point probe system, as a function of the pyrolysis temperature Tp. b Hall coefficient RH, and c carrier mobility μH and concentration N of GC thin films for Tp from 700 to 900 °C. d Raman spectroscopy, and e X-ray photoelectron spectroscopy (XPS) C1s spectra for the GC thin films obtained at a Tp of 600–900 °C. f Transmission electron microscopy images of the GC thin film obtained at a Tp of 900 °C
