Fig. 3: Static response of the glass-like carbon (GC)-based piezoresistive sensors.
From: SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
a Schematic diagram and b image of the measuring apparatus used to characterize the GC-based piezoresistive sensors. c Measurement of the bending force F as a function of the applied displacement ∆z. d Relative resistance variation as a function of the applied displacement ∆z. e Relative resistance variation as a function of the applied force F. Panels (i) and (ii) report the results of measurements performed on the GC900 and GC700 sensors, respectively. Different symbols indicate different cantilever lengths, and the corresponding lengths are shown at the bottom of the figure
