Fig. 4: Vibrational characteristics of the glass-like carbon (GC)-based sensor.
From: SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
a Setup for measuring the dynamic response to acceleration of the GC-based sensor on the cantilever. The inset is a magnified image of the sample reflecting the laser beam focused at the end of the SU-8 cantilever. b (i) Schematic drawing of the vibrating GC-based sensor, and (ii) Wheatstone bridge circuit. c Measured mechanical displacement of the GC700-based cantilever for a periodic acceleration of frequency from 300 to 1400 Hz. The measured resonance frequency Fr is 618 Hz for the cantilever with a length of 5 mm. The inset shows a Fr of 633 Hz simulated by the finite element model (FEM). d Measured output voltage VG and mechanical displacement as a function of the applied acceleration at the cantilever mechanical resonance frequency of 618 Hz
