Table 2 Measured length, spring constant, resistance, gauge factor (GF), sensitivity to the input force of the glass-like carbon (GC)-based SU-8 sensors; GC900 and GC700 indicate the GC samples pyrolyzed at 900 and 700 °C, respectively
From: SU-8 cantilever with integrated pyrolyzed glass-like carbon piezoresistor
Length of the cantilevers [mm] | 2.5 | 3.0 | 3.5 | 4.0 | 4.5 | 5.0 |
|---|---|---|---|---|---|---|
GC900 sample (w/o proof mass) | ||||||
Spring constant [N/m] | 72 | 41 | 19 | 14 | 8.4 | 6.3 |
Spring constant [N/m] (Simulation) | 50 | 29 | 18 | 12 | 8.4 | 6.1 |
R0 [MΩ] | 0.14 | 0.16 | 0.18 | 0.20 | 0.23 | 0.26 |
Gauge factor | 1.7 | 2.2 | 2.0 | 2.2 | 1.8 | 2.1 |
Force sensitivity (ΔR/R0F) [N-1] | 0.5 | 0.8 | 1.2 | 1.3 | 1.3 | 1.8 |
GC700 sample (w/proof mass) | ||||||
Spring constant [N/m] | 79 | 57 | 45 | 29 | 19 | 16 |
Spring constant [N/m] (Simulation) | 86 | 50 | 31 | 21 | 15 | 11 |
R0 [MΩ] | 20 | 22 | 28 | 31 | 35 | 38 |
Gauge factor | 2.7 | 2.7 | 3.0 | 4.2 | 3.9 | 4.5 |
Force sensitivity (ΔR/R0F) [N−1] | 1.3 | 1.3 | 1.4 | 2.3 | 2.4 | 2.7 |
