Fig. 2: Fabricating process for the as-proposed electrochemical free chlorine sensor. | Microsystems & Nanoengineering

Fig. 2: Fabricating process for the as-proposed electrochemical free chlorine sensor.

From: A batch microfabrication of a self-cleaning, ultradurable electrochemical sensor employing a BDD film for the online monitoring of free chlorine in tap water

Fig. 2

a A clean silicon wafer. b oxidation process. c Preparation of BDD film by FHCVD. d Preparation of aluminum mask by a lift-off process. e Preparation of BDD electrode by O-RIE process. f Removing Al mask. g Preparation of Pt electrode by sputtering process. h Wet etching of silicon. i Preparation of Ag/AgCl electrode. j Bonding silicon wafer and glass wafer

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