Fig. 3: SEM of the as-fabricated BDD film/electrode of the free chlorine sensor. | Microsystems & Nanoengineering

Fig. 3: SEM of the as-fabricated BDD film/electrode of the free chlorine sensor.

From: A batch microfabrication of a self-cleaning, ultradurable electrochemical sensor employing a BDD film for the online monitoring of free chlorine in tap water

Fig. 3

a–d Surface morphology of the BDD film fabricated by FHCVD at 2000× (a), 5000× (b), 20,000× (c), and 160,000× (d). e–h Surface morphology of the BDD electrode after O-RIE. i AFM image of the BDD film surface before O-RIE. j AFM image of the BDD electrode boundary. k AFM image of the BDD film surface after O-RIE

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