Fig. 1: Comparison of the structure and fabrication process between the traditional capacitive humidity sensor and the novel humidity sensor.
From: A nanoforest-based humidity sensor for respiration monitoring
a Schematic diagram of structure and capacitance distribution of a traditional capacitive humidity sensor. b Schematic diagram of structure and capacitance distribution of the proposed triple-layer humidity sensor. c Fabrication process for the nanoforest-based humidity sensor
