Fig. 6: Thickness optimization simulation and measurement results.
Thickness optimization simulation and measurement results. a Simulated acoustic transmittance versus main layer thickness for SFATs with ACFALs based on PDMS, 35-μm-thick SU-8/PDMS, SU-8, and Parylene (also for the electrode-ring SFATs); also showing the chosen layer thicknesses for the devices demonstrated in this paper along with their notations (with details shown in Table 1). b Measured impedance magnitude (upper graph) and phase (lower graph) of the fabricated transducers. c–d Measured acoustic pressure in water (c) along the central vertical axis and d along the central lateral axis on the focal plane of the fabricated devices when they are driven with six cycles of 40 Vpp sinusoidal voltage signals at their anti-resonant frequency. e Summary of the simulated acoustic transmittance (left y-axis), measured power transfer efficiency (left y-axis), and measured peak acoustic pressure at the focal point (right y-axis) of each type of transducer. The error bars represent the standard deviation of the measured values.
