Fig. 1: Main structure and working principle of the new electrochemical angular microaccelerometer with integrated sensitive microelectrodes perpendicular to flow channels.

a Schematic of the developed electrochemical angular microaccelerometer and the sensitive electrodes represented the four-electrode structure. b A 3D setup of the four-electrode structure, where a pair of anodes and cathodes were distributed on the front and back sides and run through by thousands of vias filled with an electrolyte solution. c The working principle of the MEMS electrochemical angular accelerometer in which in response to an external angular vibration, reactive ions in the electrolyte flow along the toroid channel and the vias on the sensitive micro electrodes.