Fig. 3: Simulation results of the electrochemical angular microaccelerometer with integrated sensitive microelectrodes perpendicular to flow channels.

a Simulation results of the mechanical module, where the x-axis represents the input frequency of angular vibration and the y-axis represents the output velocity of electrolyte near the electrodes. b Simulation results of the electrochemical module, where the x-axis represents the velocity frequency of the electrolyte solution and the y-axis represents the output current of electrodes. c Overall simulation results of the mechanical and the electrochemical modules, where the x-axis represents the frequency of the angular vibration and the y-axis represents the output current of electrodes.