Fig. 5: Characterization results of the developed electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels. | Microsystems & Nanoengineering

Fig. 5: Characterization results of the developed electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels.

From: A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels

Fig. 5

a Results of sensitivity characterization of the developed devices, in which the x-axis represents the frequency of angular acceleration and the y-axis represents the sensitivity. b Results of correlation characterization of two devices incorporating sensitive microelectrodes with size of via (Ls) at 100 μm and width of electrode (Lw) at 20 μm. c Results of noise characterization of the device without and with a compensation circuit.

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