Fig. 5: Summary of microsystem technologies with various measurement scales.
From: Recent advances in microsystem approaches for mechanical characterization of soft biological tissues

Illustration of the approximate ranges of measurement depths and spatial resolutions for various biological targets via different types of evaluation methods, including AFM, cantilever-based measurement (CBM), piezoelectric-actuator/sensor techniques (PAT), optical coherence elastography (OCE), electromechanical modulus (EMM) sensors, ultrasound techniques (US) and magnetic resonance elastography (MRE)