Fig. 2: Design and fabrication results for a glass FZP array. | Microsystems & Nanoengineering

Fig. 2: Design and fabrication results for a glass FZP array.

From: Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields

Fig. 2

a Top view of an FZP. b The FWHM value of the intensity distribution at the focal plane of the designed FZP lens. c Glass FZP array strategy. D = 400 μm, M x N is a 20 × 20 array, \(P_{x1}\) = 20 μm, \(P_{x2}\) = 21 μm, \(P_y\) = 25 μm. d SEM image of the FZP array fabricated using K-PG375 glass imprinted using a glass thermal-imprinting system that included an infrared laser. e The simulation and experimental FWHM values of the average beam intensities of the glass FZP. f The simulated and experimental focal lengths of the glass FZP were compared by measuring normalized spot intensities

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