Fig. 1: Structure and working principle of the micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes.

a Schematic of the electrochemical angular accelerometer mainly composed of highly integrated sensitive microelectrodes, a toroid channel and an electrolyte solution, where the structure of highly integrated sensitive microelectrodes was shown in b. c Working principle of the electrochemical angular accelerometer in which in response to an external angular acceleration, reactive ions in the electrolyte solution flow along the toroid channel and the vias on the sensitive microelectrodes. The corresponding electrochemical reactions occur on both sides of paired anodes and cathodes and converts angular acceleration into a voltage signal by a conversion circuit