Fig. 3: Fabrication and assembling of the micromachined electrochemical angular accelerometer. | Microsystems & Nanoengineering

Fig. 3: Fabrication and assembling of the micromachined electrochemical angular accelerometer.

From: A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

Fig. 3

a The schematic of manufacturing process of the highly integrated sensitive microelectrodes as the key component of the micromachined electrochemical angular accelerometer includes key steps of (1) wafer cleaning, (2) lithography, (3) deep reactive ion etching, (4) lithography and sputtering, (5) lift-off, (6) lithography, (7) deep reactive ion etching, (8) lithography and sputtering, (9) lift-off, (10) lithography and sputtering, (11) lift-off, (12) SU-8 imprint, (13) bonding. b SEM of the cross-section view of the sensitive microelectrodes. c The fabricated highly integrated sensitive microelectrodes. d Prototype of the developed angular accelerometer based on the highly integrated sensitive microelectrodes

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