Table 1 Comparison of key performances of angular accelerometers

From: A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

Working principle

Ref

Sensitivity /V/(rad/s2)

Bandwidth (−3 dB) /Hz

Noise/(rad/s2)/Hz1/2

Capacitive

2

0.4~2.5

0.05–20

/

Electromagnetic

7

5~50

0.03–30

/

8

1~10

0.7–30

/

Electrochemical

17

8

0.02–10

−105 dB

18

10

0.01–8

−118 dB

This study

80

0.01–18

−148 dB