Fig. 1: Structure of cellular shape actuator.

Schematic diagrams showing (a) a cellular electrostatic actuator comprised of a silicon mesh with brick wall structure forming the main frame (backbone) of the actuator (grey); (b) zoomed view within the mesh filled by a network of electrically connected polysilicon electrodes separated from the silicon walls by transduction air gaps; (c) layer-by-layer structural arrangement of each individual network layer inside the actuator; (d, e) top view of single cell and the displacement profile of the cell upon application of electrostatic force, which pull the sidewalls towards each other; (f) lateral cross-sectional view of an array of cells and charge distribution upon the application of actuation voltage; (g) displacement profile of the cell array, where the lateral electrostatic force pulls the electrodes towards each other