Fig. 2: Structral design.
a SEM image of a fabricated 4010 μm × 2010 μm × 50 μm cellular electrostatic actuator array with 7600 cells; (b) Zoomed in view of the brick wall arrangement of actuator cells (c) Zoomed in view of polysilicon electrodes and interconnects on the top surface of the device; (d) zoomed in view of polysilicon anchor points on the actuator silicon frame; (e) Zoomed in view of the air gap between polysilicon and the silicon frame sidewalls
