Fig. 4: Analytical and FEA model analysis.

a Schematic view of a deflected cantilever with critical dimensions of the curvature. b Graph presenting plot of displacement of the actuator upon increasing the actuation voltage for both 2 × 1 mm device and 4 × 2 mm device. FEA analysis result plot also shown, which complies with the experimental data. c Schematic of an individual cell and its displacement profile when force is applied along the sidewall of the cell. d Schematic view of the cross section of a cell with deflection of silicon sidewall