Fig. 6: Fabrication process flow diagram. | Microsystems & Nanoengineering

Fig. 6: Fabrication process flow diagram.

From: Cellular shape micromachined actuator ribbons

Fig. 6: Fabrication process flow diagram.The alternative text for this image may have been generated using AI.

Schematic showing cross-sectional view of the modified HARPSS micromachining process flow used for fabrication of the high-output cellular electrostatic actuator arrays

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