Fig. 3: Deformation effect of stress gradient on clamped-clamped (c-c) beams.
From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
FE simulations prove the negligible effect of stress gradient on c-c beams below the critical stress or temperature, above which the beam buckles. The critical temperature depends on the beam length, but for tensile stress (negative temperature increase) all beams remain flat regardless of stress gradient level.
