Fig. 8: MEMS Electrical equivalent.
From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
Electrical equivalents of a MEMS resonator with Lorentz wire interference included (a, b). a Interference is included explicitly. Css is the shield-sense capacitance. Cws is the wire-shield coupling capacitance. b Lorentz current interference effects are built in Rp and Cp. c Admittance G-B versus frequency example curves.
