Table 3 Measured Ω and sensitivity S (Eqs. (26)) and \(S^{\prime}\) (Eq. (27)) of two QFN-packaged devices
From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
Device type | Setup Helmholtz coil | Measurement conditions (RMS) | Fitted linear eq. (Eqs. (22) to (24)) \({Y}_{m}={Y}_{m}^{B = 0}\cdot (1+{{\Omega }})\) | Magnetic sensitivity (RMS) |
|---|---|---|---|---|
Z L = 600 μm g = 0.5 μm Q = 770 nw = 2, nB = 10 |
| VAC = 10 mV VDC = 0.5 V iL = 45.14 μA | 1/Rm = 1.075 × 10−6 ⋅ (1 + 96.00 ⋅ B(T)) 1/Lm = 1.255 × 10−3 ⋅ (1 + 97.77 ⋅ B(T)) Cm = 1.543 × 10−15 ⋅ (1 + 97.80 ⋅ B(T)) | Ωz = 96.89 ⋅ B(T) Sz = 1.05 μA/T \({S}_{z}^{\prime}=46.3\,{{{{\mu }}}}{{{\rm{A}}}}\)/(T V mA) |
XY L = 600 μm g = 0.9 μm Q = 1700 nw = 4, nB = 6 |
| VAC = 10 mV VDC = 1 V iL = 45.14 μA | 1/Rm = 0.3958 × 10−6 ⋅ (1 + 311.0 ⋅ B(T)) 1/Lm = 1.9287 × 10−4 ⋅ (1 + 306.8 ⋅ B(T)) Cm = 2.851 × 10−16 ⋅ (1 + 306.8 ⋅ B(T)) | Ωxy = 308.9 ⋅ B(T) Sxy = 1.22 μA/T \({S}_{xy}^{\prime}=27.1\,{{{{\mu }}}}{{{\rm{A}}}}\)/(T V mA) |
