Table 6 Yield results of the two high temperature tests on xy devices
From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
XY device with long sensing plates | |||||
|---|---|---|---|---|---|
Dev. L (μm) | 300 | 400 | 500 | 600 | |
Sense L (μm) | 100 x 4 | 82 x 6 | 74 x 8 | ||
Couplings | 4 | 6 | 6 | TOTAL | |
Yield before 400 °C 1 h | 13/13 (100%) | 11/13 (85%) | 13/13 (100%) | 37/39 (95%) | |
Yield after 400 °C 1 h | 7/13 (54%) | 5/13 (38%) | 10/13 (77%) | 22/39 (56%) | |
Yield before 450 °C 0.5 h | 13/13 (100%) | 13/13 (100%) | 12/13 (92%) | 38/39 (97%) | |
Yield after 450 °C 0.5 h | 5/13 (38%) | 2/13 (15%) | 0/13 (0%) | 7/39 (18%) | |
XY device improved with shorter sensing plates (Fig. 6a) | |||||
|---|---|---|---|---|---|
Dev. L (μm) | 300 | 400 | 500 | 600 | |
Sense L (μm) | 33 x 6 | 36 x 7 | |||
Couplings | 2 | 6 | TOTAL | ||
Yield before 400 °C 1 h | 12/13 (92%) | 13/13 (100%) | 25/26 (96%) | ||
Yield after 400 °C 1 h | 12/13 (92%) | 13/13 (100%) | 25/26 (96%) | ||
Yield before 450 °C 0.5 h | 12/13 (92%) | 13/13 (100%) | 25/26 (96%) | ||
Yield after 450 °C 0.5 h | 5/13 (38%) | 3/13 (23%) | 8/26 (31%) | ||
