Table 9 Comparison of commercial and in research-state 3 axis magnetometers

From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers

3D Magnetometer

Technology

Full scale range ( ± mT)

Current per axis (μArms)

Figure of merit* (μTμArms/√Hz)

Footprint 3 axes (mm2)

Offset (μT)

COMMERCIAL

STMicroelectronics LIS3MDL70

AMR

1.2

90

~10

4

100

STMicroelectronics LSM303AGR71

AMR

4.9

33−316a

6−20a

4b

6c

Freescale MAG311072

TMR

1.0

2.9-300a

3.6-19a

4

100

AKM AK897573

Hall

1.2

117

~100

4

300

AKM AK0994074

TMR

1.2

40−267

0.20−0.76

2.56

No data

Honeywell HMC588375

AMR

0.8

33/640

3.4

9

No data

Bosch BMM15076

AMR+Hall

1.3

57-1630a

35.6-155a

2.43

40b

R&D

Kyynarainen et al.32

MEMS LFM

0.2

100

X/Y: 1.0, Z: 7.0

>11.5

25

Laghi et al.40

MEMS LFM

5.5

33d

X/Y: 6.1, Z: 6.7f

4d

5000b

Marra et al.49,77

MEMS LFM

X: 6.0, Y: 5.5, Z: 7.0

70d

X: 8.4, Y: 5.2, Z: 7.7f

0.53d

No datae

This work (QFN)

CMOS-MEMS LFM

Z: 32g

0-600d

X/Y: 1.8, Z: 3.0f

0.4d

X/Y: 0.13, Z: 0.43

  1. *Normalized for a single axis. For R&D, X, Y and Z axis values are given
  2. aValue varies depending on the selected current/bandwidth
  3. b3D magnetometer and 3D accelerometer
  4. cCan be reduced to a few μT with manual DC compensation or calibration
  5. dASIC current consumption/area not included
  6. eExpected to be in the same order of magnitude as Laghi et al.40 given the design and manufacturing process similarities
  7. fAssuming current is reused for the 3 axes. Otherwise the triple value must be taken
  8. gTested with a current of 50 μA