Table 9 Comparison of commercial and in research-state 3 axis magnetometers
From: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers
3D Magnetometer | Technology | Full scale range ( ± mT) | Current per axis (μArms) | Figure of merit* (μTμArms/√Hz) | Footprint 3 axes (mm2) | Offset (μT) |
|---|---|---|---|---|---|---|
COMMERCIAL | ||||||
STMicroelectronics LIS3MDL70 | AMR | 1.2 | 90 | ~10 | 4 | 100 |
STMicroelectronics LSM303AGR71 | AMR | 4.9 | 33−316a | 6−20a | 4b | 6c |
Freescale MAG311072 | TMR | 1.0 | 2.9-300a | 3.6-19a | 4 | 100 |
AKM AK897573 | Hall | 1.2 | 117 | ~100 | 4 | 300 |
AKM AK0994074 | TMR | 1.2 | 40−267 | 0.20−0.76 | 2.56 | No data |
Honeywell HMC588375 | AMR | 0.8 | 33/640 | 3.4 | 9 | No data |
Bosch BMM15076 | AMR+Hall | 1.3 | 57-1630a | 35.6-155a | 2.43 | 40b |
R&D | ||||||
Kyynarainen et al.32 | MEMS LFM | 0.2 | 100 | X/Y: 1.0, Z: 7.0 | >11.5 | 25 |
Laghi et al.40 | MEMS LFM | 5.5 | 33d | X/Y: 6.1, Z: 6.7f | 4d | 5000b |
MEMS LFM | X: 6.0, Y: 5.5, Z: 7.0 | 70d | X: 8.4, Y: 5.2, Z: 7.7f | 0.53d | No datae | |
This work (QFN) | CMOS-MEMS LFM | Z: 32g | 0-600d | X/Y: 1.8, Z: 3.0f | 0.4d | X/Y: 0.13, Z: 0.43 |