Fig. 5: Mass sensitivty of the resonator for different vibration modes. | Microsystems & Nanoengineering

Fig. 5: Mass sensitivty of the resonator for different vibration modes.

From: Measuring nanoparticles in liquid with attogram resolution using a microfabricated glass suspended microchannel resonator

Fig. 5

Allan deviation and corresponding lowest buoyant mass detection limit for a the first bending mode, b the second bending mode and c the first torsional mode. The validity line (black-dotted line) is determined by (2.33/ωPLL). The blue-dashed and red-dashed lines represent the Allan deviation that can be achieved theoretically by our system if only thermomechanical noise is present

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