Table 1 Dimensions of the device
Parameter | Value (μm) |
|---|---|
Cantilever length | 200 |
Channel length (suspended) | 408 |
Gap between the legs (outer) | 5.4 |
Channel width (outer) | 11.3 |
Channel height (outer) | 3.5 |
Channel wall thickness | 1.7 |
Parameter | Value (μm) |
|---|---|
Cantilever length | 200 |
Channel length (suspended) | 408 |
Gap between the legs (outer) | 5.4 |
Channel width (outer) | 11.3 |
Channel height (outer) | 3.5 |
Channel wall thickness | 1.7 |