Fig. 7: MEMS specimen setup and characterization.
From: The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
a deflection states of actuator for both deflection directions, dashed lines indicate deflection. b in-plane deflection measurement data obtained with edge tracking (sinusoidal excitation at 50 Hz, ± 12 Vdc) c MEMS device on carrier board including wire bonds. d sound pressure level measurement data ( ±10 Vdc, ±6 Vp). e THD measurement data ( ±10 Vdc, ±6 Vp), THD and K3 measured data overlap, while K2 fraction remains very low
