Table 1 Parameter set chosen for the layout for fabrication
From: The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Parameter | Value | Unit |
|---|---|---|
Electrode length | 430 | μm |
Middle electrode thickness | 5 | μm |
Outer electrode thickness | 2 | μm |
Electrode distance/gap | 2.5 | μm |
Height of electrode anchor | 34 | μm |
