Table 2 Parameters used in the equivalent circuit model
From: The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Parameter | Fitting against FEM | Adjustment to experiments |
|---|---|---|
Spring constant, keff | 97.8 N/m | 77.8 N/m |
NED lever factor, θ | 10.8 | 9.81 |
Effective mass, meff | 1.25 × 10−7 kg | 9.96 × 10−8 kg |
Quality factor, Q | – | 2.5 |
