Fig. 4: Sensitivity and cross-sensitivity analysis when 100 g acceleration in each direction is applied. | Microsystems & Nanoengineering

Fig. 4: Sensitivity and cross-sensitivity analysis when 100 g acceleration in each direction is applied.

From: Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

Fig. 4: Sensitivity and cross-sensitivity analysis when 100 g acceleration in each direction is applied.The alternative text for this image may have been generated using AI.

a The deformation when x-direction acceleration ax = 100 g, and stress distribution of (b) x/y and (c) z measurement unit; d the deformation when ay = 100 g, and stress distribution of (e) x/y and (f) z-measuring unit; g the deformation when az = 100 g, and stress distribution of (h) z and (i) x/y-measuring unit. j The output circuit under x-direction acceleration. k The output circuit under y-direction acceleration. l The output circuit under z-direction acceleration

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