Fig. 8: Experimental platform, Static and dynamic performance of the accelerometer. | Microsystems & Nanoengineering

Fig. 8: Experimental platform, Static and dynamic performance of the accelerometer.

From: Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

Fig. 8

a Centrifugal test system for static performance testing. b The dynamic calibration system. c Output voltage in the x-direction acceleration. d Output voltage in the y-direction acceleration. e Output voltage in the z-direction acceleration. f The zero-g offset characteristic of the accelerometer. g Temperature coefficient of zero-g offset (TCO). h The characteristic curves of the resonance frequency of x- or y measuring units. i The characteristic curves of the resonance frequency of z-measuring unit

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