Table 1 Dimensions of each part of the accelerometer

From: Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

Parameter

Value/μm

Parameter

Value/μm

Parameter

Value/μm

L1

300

d6

560

e8

275

L2

500

d7

860

e9

345

L3

570

d8

425

e10

325

L4

320

d9

275

e11

325

b1

40

d10

195

e12

2620

b2

20

d11

520

T

405

b3

80

e1

230

T1

410

b4

75

e2

1155

T2

10

d1

410

e3

250

b

5

d2

1000

e4

150

h

10

d3

420

e5

2620

l

70

d4

1500

e6

670

D

110

d5

2000

e7

275

  
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