Table 2 The characteristic parameters of the triaxial accelerometer

From: Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams

Parameters

x measurement unit

y measurement unit

z measurement unit

Unit

FEM results

Test results

FEM results

Test results

FEM results

Test results

Range

±100

±100

±100

±100

±100

±100

g

Sensitivity

2.42

2.43

2.42

2.44

2.39

2.41

mV/g/5 V

Natural frequency

11.8

11.4

11.8

11.4

13.9

13.2

kHz

Nonlinearity

 

1.42

 

1.21

 

1.83

%FS

Cross-sensitivity

0

Sxy = 0.037

0

Syx = 0.038

0

Szx = 0.016

mV/g/5 V

0

Sxz = 0.015

0

Syz = 0.012

0

Szy = 0.028

Zero-g offset

 

<0.82

 

<0.82

 

<0.82

%FS/h

TCO

 

0.00066

 

0.00064

 

0.00118

/°C

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