Table 2 The parameters for noise simulation of the accelerometer

From: An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement

Parameter

T

f0

m

Q

η

C

QT

Value

297 K

867.4 Hz

0.15 g

84

0.03 @40 Hz

4.58 nF

22.74 pC/g

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