Table 3 Specification summary of the designed accelerometer
From: An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
Specification | Value | Measurement Times | Standard Deviation |
|---|---|---|---|
Sensitivity | 22.74 pC/g | 5 | 0.25 pC/g |
Frequency range | 10–200 Hz (5%) | 14 | N/A |
Natural frequency | 867.4 Hz | 4 | 4.39 Hz |
Noise | 5.6 \(\mu {{{\rm{g}}}}/\sqrt{{{{\rm{Hz}}}}}\) at 20 Hz (with circuit) | 3 | 0.0634 \(\mu {{{\rm{g}}}}/\sqrt{{{{\rm{Hz}}}}}\) |
