Fig. 2: Optical images detailing selected microfabrication stages of the platform from Fig. 1. | Microsystems & Nanoengineering

Fig. 2: Optical images detailing selected microfabrication stages of the platform from Fig. 1.

From: Microfabricated polymer-metal biosensors for multifarious data collection from electrogenic cellular models

Fig. 2

a Optical image corresponding to Fig. 1b. In this image, the protective film is left partially in place to better contrast each micromilled, microdrilled, or microrastered element. b Optical image corresponding to Fig. 1e. The cured Ag-ink is precision-aligned to reside within the desired packaging traces and pads. c Optical image corresponding to Fig. 1g. Both Ti/Au IDEs for the thermal and analyte sensor are deposited, and ink-cast tracing leading to the inserted 3D microelectrodes can be observed, along with the microrastered microheater region. d Close-up optical image of the central device region shown in c. Microfluidic (µF) ports are a facile substitution or addition to the 3D microelectrode insertion vias, and additional microfluidic ports may be added elsewhere in the culturing area. e Optical image of the culture well attachment fabrication step shown in Fig. 1h. f Optical image of a fabricated biosensor shown in Fig. 1j. In this image, the microheater is attached in the microrastered region for testing the devices’ temperature sensing capabilities

Back to article page