Fig. 2
Basic conceptual design of the sensor chip. a Green transparent 4H-SiC wafer. b Schematic of the sensor chip structure. c A-A’ cross-sectional view. d Wheatstone bridge connection
Fig. 2 | Microsystems & Nanoengineering
Basic conceptual design of the sensor chip. a Green transparent 4H-SiC wafer. b Schematic of the sensor chip structure. c A-A’ cross-sectional view. d Wheatstone bridge connection
