Fig. 6 | Microsystems & Nanoengineering

Fig. 6

From: Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Fig. 6

a Full-scale output histogram and zero-pressure output change curve at different temperatures. b Sensitivity versus temperature curve. c, d The resistance value of two chips when immersed in H2SO4 (pH = 1.05) and NaOH (pH = 12.52) solutions, respectively. e Schematic diagram of the sensor being irradiated by industrial CT. f The resistance value and zero output change after X-ray irradiation

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