Table 1 The GF values corresponding to different piezoresistor dimensions

From: Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Name

Dimension (μm)

Sheet resistance (Ω/□)

Theoretical resistance value (kΩ)

Measured resistance value (kΩ)

Transverse GFt

Longitudinal GFl

R1

L400 × W10

100

4

3.25

40

−26.5

R2

L200 × W30

0.667

0.533

33.4

−23.9

R3

L400 × W20

2

1.902

35.4

−24.3

R4

L200 × W10

2

1.825

31.8

−22.4

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