Table 2 The TCR of R13 at different temperatures

From: Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Temperature(°C)

−50

0

25

100

200

300

400

450

500

TCR (ppm/°C)

−1874.6

−2087.0

0

−490.7

−310.2

60.5

407.3

653.3

925.4

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